The Model 3760 Series is a compact, low-cost mass flow meter developed
based on the Model 3660 Series. It has been developed as a standard
model of various analyzers and vacuum equipment for research and
development at universities and research institutes.
• Improved constant-current temperature difference detection type flow sensor for quick response
• The compact body permits installation at any location.
・Chamber pressure control
・Electronic device manufacturing
・Fuel cell testing
・Gas flow monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing