This mass flow controller/meter driven by 24VDC power supply has been developed as a successor of the MODEL
8300. The viewpoint change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.

  • The high-lift actuator allows this compact model to control a large flow rate.
  • Equipped with a display and setting unit, this model can be operated by the 24VDC power supply.
  • The RS232C/RS485 communication function and integration function are provided as standard equipment.
  • The 14-bit converter permits to display and operation in 4-1/2 digits.
  • Control of the flow rate of inflammable gas is possible because the heat generating part of the sensor is not exposed to the gas.
  • There are no limitations to the mounting position that may be employed.
  • In addition to the SV setting, five other patterns can be set.
  • Auto zero and auto close functions are also standard.


Flow range10SCCM〜20SLM30SLM〜100SLM
(N2 equivalent 20℃/1ATM)(freely selectable)(freely selectable)
Sensor typeThermal sensor
Valve type(*1)Normally closed proportional solenoid valve
Control range(*1)2〜100%(F.S.)5〜100%(F.S.)
Temperature coefficient±0.1F.S./℃(15〜35℃)±0.2F.S./℃(15〜35℃)
Operating differential
F.S.≤5SLM 50〜300kPa(G)F.S.≤50SLM 150〜300kPa(G)
F.S.>5SLM 100〜300kPa(G)F.S.>50SLM 200〜300kPa(G)
Option:Medium differential pressure (MP), low differential pressure (LP) specifications are available
Allowable operating pressure(*1)500kPa(G) or less
Proof pressure980kPa(G)
Leak rate≤1×10−8Pa・㎥/s(excluding permeation of He)
Allowable operating temperature5〜45℃
Allowable operating humidity10〜90%RH(No condensation allowed)
Materials of the gas contact partBody: SUS316
Valve seat : FKM(option: CR or NBR)
Sealing : FKM(option: CR or NBR)
Electrical connectionDsub half-pitch 20pin DX10M−20S(HRS)
Flow rate setting signal0〜5VDC(input impedance 100kΩ or more)
(*1)or 4〜20mA selectable
Flow rate output signal0〜5VDC(external load resistance 250kΩ or more) or
4〜20mA (external load resistance 300Ω or less)selectable
CommunicationRS232C(3 wire)or RS485(3 wire) selectable
Other functionsInstantaneous flow rate・integrated flow rate display ( 7-segment 4-digit LED
display accuracy ±1% integrated display 0000〜9999MAX),
Alarm output(NPN open collector output 2 points
Max DC35V 50mA), pattern setting(5 pattern) function
Required power supply24VDC±10%(ripple 5%) current consumption 300mA max
JointStandard 1/4F900(9/16-18UNF)Standard 3/8F900(9/16−18UNF)
(Main unit bore)Option 1/8F900, 1/4UJR,Option 1/2F900, 3/8UJR,
 Rc1/4 etc.Rc3/8 etc.
WeightApprox. 1200gApprox. 1500g

(*1)Only for the mass flow controller.

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