fcon cube mfc mass flow controllerFeatures

  • Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
  • It can be used by connecting the gas fitting and power outlet.
  • The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of the interval).
  • Input & Output Signal : Analog (0~5VDC).
  • Equipped with monitor terminal for setting/output voltage on the back.
  • This product is ideal for use on the desktop, space-saving.
  • If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
  • Compact and lightweight integral unit
  • Easy flow Measuring / Controlling
  • Flow rate display and setting functions
  • SET / OUT switching function
  • External output terminals are provided on the rear


Model CUBE MFC 1005 / 1020 / 1030 / 1050 / 1100
Gases Most gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Valve type Normally Open
Flow range* 10,20,30,50,100,200,300,500SCCM
Flow rate control range 5-100% F . S.
Accuracy ±2%F. S. ( Accuracy guaranteed between 15-35°C)
Repeatability ±0.2% F.S
Response speed ≦6sec
Operating differential pressure 50-300kPa (conform to built-in Mass flow controller specification)
Pressure Resistance 1MPa (G)
Leak Integrity 1×10-7Pa•m3/ sec (He)
Operating temperature 5-50°C less than 85% RH
Wetted surface material SUS316, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Setting signal 0.25-5VDC
Output signal 0-5VDC
Standard fitting** 1/4in. SWL (equivalent), One-touch fittings
Mass flow control 10-turn potentiometer
Display Instantaneous flow
Input power AC100 – 240V
Output terminal Setting the signal /Output signal
  • At F CON, flow rates (SCCM, S LM) are converted to values at 0ºC, 1 01.3kPa abs (1atm) for calibration.