Kofloc DF-250C Series Digital Mass Flow Meter

The DF-250 series is a high-performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers a large flow rate line-up up to 300SLM.

Feature

  • Standard gases are calibrated with actual gas
  • ~50SLM model offers a fast response of ≤1 sec
  • 10sccm ~ 300SLM flow range line-up
  • Communications functions installed as a standard feature(RS485)
  • RoHS/CE Standard compliant

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Specification

Sensor type Thermal sensor
Valve type Normally closed proportional solenoid valve
Applicable gases*1 N2, Air, H2, He, Ar, O2, CO2, etc.
(Gases not specifically mentioned here are subject
to calibration for N2 equivalent.)
 Air, N2
Flow range*2 10 SCCM to 10 SLM 20 to 50 SLM
(20 to 30 SLM for CO2)
100, 150 SLM 200, 300 SLM
Control range 2 to 100% (F.S.) 5 to 100% (F.S.)
Response*3 Total flow rate control range ≤ 1 sec (within ±2% F.S.) ≤  1.5 sec / ≤ 3 sec less than 10%
(within ±2% F.S.)
≤  2 sec (within ±2% F.S.)
Accuracy*4 ±1.0% F.S. ±2.0% F.S
Repeatability ±0.25%F.S. ±0.5%F.S.
Operating differential
pressure*5
50 to 300 kPa
(100 to 300 kPa for Ar and CO2)
100 to 300 kPa
(150 to 300 kPa for Ar and CO2)
150 to 350 kPa 200 SLM: 200 to 350 kPa
300 SLM: 250 to 350 kPa
Inlet maximum pressure 500kPa(G)
Proof pressure 980kPa(G)
External leak rate ≤1.0 x 10-8 Pa·m3/sec (He) ≤1.0 x 10-7 Pa·m3/sec (He)
Temperature Working temp. 5 to 50℃
Accuracy
guaranteed temp.
15 to 35℃
Allowable
storage temp.
-10 to 60℃
Allowable operating humidity 10 to 90% RH (without dew condensation)
Materials of gas contact part SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM
Electrical connection D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) D-sub 9-pin ,
HR-10A (two)
Flow rate setting signal 0 to 5 V DC (input impedance: approx. 1 MΩ)
Flow rate output signal 0 to 5 V DC (load resistance 10 kΩ)
Digital communication Address setting with RS485 rotary switch: up to 99 devices (9600 bps)
Required power supply (DC) +15 V DC (±5%) : 150 mA
-15 V DC (±5%) : 150 mA
+15 V DC (±5%) : 150 mA
-15 V DC (±5%) : 250 mA
24 V DC (±10%) : 450 mA
Joint*6 1/4 F900 (standard), 1/4 UJR, Rc 1/4 1/2 SW (standard), 3/4 SW
Mounting posture Horizontal installation recommended.
Weight*7 Approx. 850 g Approx. 1000 g Approx. 2250 g Approx. 3500 g

*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.

*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.

*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.

*4 Guarantee for calibration gas: N2.

*5 Accuracy for calibration gas: N2, flow range (max. full scale).

*6 The operating differential pressure may differ depending on specifications.

*7 Contact us for any other joints.

*8 Exclusive of the weight of joint

for more information and price please contact marketing@wmablog.com

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